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Enhanced Passivation Effect of Tunnel Oxide Prepared by Ozone-Gas Oxidation(OGO) for n-Type Polysilicon Passivated Contact(TOPCon) Solar Cells
State Key Lab of Silicon and Advanced Semiconductor Materials and School of Materials Science & Engineering, Zhejiang University;
Ningbo Institute of Materials Technology and Engineering, Chinese Academy of Sciences;
Hangzhou Global Scientific and Technological Innovation Center, Zhejiang University
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Lei Yang
Yali Ou
Xiang Lv
Na Lin
Yuheng Zeng
Zechen Hu
Shuai Yuan
Jichun Ye
Xuegong Yu
Deren Yang
开通知网号
Nowadays,a stack of heavily doped polysilicon(poly-Si) and tunnel oxide(SiOx) is widely employed to improve the passivation p...
机 构:
State Key Lab of Silicon and Advanced Semiconductor Materials and School of Materials Science & Engineering, Zhejiang University;
Ningbo Institute of Materials Technology and Engineering, Chinese Academy of Sciences;
Hangzhou Global Scientific and Technological Innovation Center, Zhejiang University;
领 域:
电力工业;
关键词:
interface states;
ozone-gas oxidation;
silicon solar cells;
tunnel oxide passivation contact(TOPCon);
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Energy & Environmental Materials
2025年01期
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